LiCl-enhanced capacitive humidity-sensing properties of cadmium sulfide grown on silicon nanoporous pillar array

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• 作者：Ming Hai Feng ; Wen Chuang Wang ; Xin Jian Li
• 刊名：Journal of Materials Science
• 出版年：2017
• 出版时间：April 2017
• 年：2017
• 卷：52
• 期：7
• 页码：3841-3848
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Materials Science, general; Characterization and Evaluation of Materials; Polymer Sciences; Continuum Mechanics and Mechanics of Materials; Crystallography and Scattering Methods; Classical Mechanics;
• 出版者：Springer US
• ISSN：1573-4803
• 卷排序：52

文摘

The extensive application of humidity sensors has greatly stimulated the study on high-performance humidity-sensing materials. In the paper, we report that a prototype humidity sensor was prepared by growing cadmium sulfide (CdS) on silicon nanoporous pillar array (Si-NPA) through a successive ionic layer adsorption and reaction method followed by immersing the samples in the solution of lithium chloride (LiCl). It was demonstrated that through the immersion treatment, the humidity-sensing properties including the response and its linearity, response and recovery time, hysteresis, and measuring reproducibility and stability were improved significantly. These results indicated that LiCl-immersed CdS/Si-NPA might be a promising material for fabricating humidity sensors applied to medium and low humidity range.