丝网印刷法制备极限电流氧传感器扩散孔的研究

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英文篇名：Research on diffused hole of limiting current oxygen sensor fabricated by screen printing method 作者：程楚 ; 王金霞 ; 简家文 ; 邹杰 英文作者：CHENG Chu;WANG Jinxia;JIAN Jiawen;ZOU Jie;School of Information Science and Engineering,Ningbo University;Ningbo University of Technology; 关键词：氧传感器 ; 流延 ; 高温共烧陶瓷 ; 极限电流 英文关键词：oxygen sensor;;tape-casting;;high temperature co-fired ceramic(HTCC);;limiting current 中文刊名：CGQJ 英文刊名：Transducer and Microsystem Technologies 机构：宁波大学信息科学与工程学院;宁波工程学院; 出版日期：2019-08-09 出版单位：传感器与微系统 年：2019 期：v.38;No.330 基金：国家自然科学基金青年科学基金资助项目(61701267);; 宁波市科技局自然科学基金资助项目(2017A610099);; 浙江省自然科学基金一般资助项目(LY18F010009) 语种：中文; 页：CGQJ201908004 页数：4 CN：08 ISSN：23-1537/TN 分类号：17-20

摘要

为了研究采用丝网印刷法制备的小孔扩散障对极限电流氧传感器的影响,采用流延法制备8%molY_2O_3稳定ZrO_2(8YSZ)膜片;通过丝网印制法制备了敏感电极和扩散障,最后通过共烧获得小孔扩散障型极限电流氧传感器。利用扫描电镜(SEM)等手段对氧传感器进行物理结构的表征,发现通过丝网印刷获得的传感器扩散障结构良好,多层对位效果良好。通过计算验证了8YSZ电导率能产生足够大的泵氧电流。进一步对传感器的气敏特性进行测试,发现传感器具有一定的饱和平台,工作温度对极限电流具有一定的影响,同时发现极限电流与氧气浓度存在正常扩散模型的线性关系。
        In order to study on effect of preparation technology of small hole diffusion barrier in limiting current oxygen sensor,8 % mol Y_2O_3 stabilized ZrO_2( 8 YSZ) diaphragm is prepared by tape-casting method. Sensing electrodes and diffusion barriers are prepared by screen printing,finally,limiting current oxygen sensor with a small hole as diffusion barrier is obtained by co-firing. The micro structure of the oxygen sensor is characterized by means of scanning electron microscopy( SEM). It is found that the structure of diffusion barrier obtained by screen printing is acceptable and the new lamination method works well. It is verified by calculation that the 8 YSZ conductivity is proved that it possess enough conductivity to be used as pumping electrode by EIS and theoretical calculation. Furthermore,the gas sensing characteristics of the sensor are also tested. It is found that the sensor performance a saturation platform and the performance is influenced by working temperature. At the same time,the sensor exhibits ideal linear relationship between limiting current and oxygen concentration.

引文

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