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1.Effects of rapid thermal annealing on structural, chemical, and electrical characteristics of atomic-layer deposited lanthanum doped zirconium dioxide thin film on 4H-SiC substrate

作者：Way Foong Lim^a ; ^b ; ^{wayfoong317@yahoo.com.sg" class="auth_mail" title="E-mail the corresponding author} ; Hock Jin Quah^a ; ^b ; ^{jinquah1st@hotmail.com" class="auth_mail" title="E-mail the corresponding author} ; Qifeng Lu^c ; ^{Qifeng@liverpool.ac.uk" class="auth_mail" title="E-mail the corresponding author} ; Yifei Mu^c ; ^{Y.mu@student.liverpool.ac.uk" class="auth_mail" title="E-mail the corresponding author} ; Wan Azli Wan Ismail^d ; ^{azli.ismail@mimos.my" class="auth_mail" title="E-mail the corresponding author} ; Bazura Abdul Rahim^d ; ^{bazura@mimos.my" class="auth_mail" title="E-mail the corresponding author} ; Siti Rahmah Esa^d ; ^{rahmah.esa@mimos.my" class="auth_mail" title="E-mail the corresponding author} ; Yeh Yee Kee^d ; ^{yy.kee@mimos.my" class="auth_mail" title="E-mail the corresponding author} ; Ce Zhou Zhao^c ; ^e ; ^{cezhou.zhao@xjtlu.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Zainuriah Hassan^a ; ^b ; ^{zai@usm.my" class="auth_mail" title="E-mail the corresponding author} ; Kuan Yew Cheong^a ; ^f ; ^{srcheong@usm.my" class="auth_mail" title="E-mail the corresponding author} ; ^{ckuanyew@yahoo.com" class="auth_mail" title="E-mail the corresponding author}

关键词：Lanthanum doped zirconium oxide ; Atomic layer deposition ; Rapid thermal annealing ; X-ray photoelectron spectroscopy ; Time-of-flight secondary ion mass spectrometry

刊名：Applied Surface Science

出版年：2016

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